Dry pumps iGX
Description
The Edwards iGX Dry Pumps provide a versatile vacuum pump platform with reliable performance for clean to medium-duty silicon and compound semiconductor applications. Compact size and low vibration allow great flexibility as iGX pumps can be used for on-tool, proximity or remote installations – in turn, ensuring space savings and ultimately reduced overall cost of ownership. The iGX pumps also offer Ethernet connectivity and other networking options.
Specification
- Reduced Cost of Ownership
- Up to a 50% reduction in utilities cost compared to iL/iH drypumps
- No preventative maintenance
- Flexible Installation Options
- Small and light for easy installation
- On-tool, close proximity, or remote
- Possible Tool Throughput Improvements
- One of the fastest load lock pumps available
- Consistent Pumping Performance Globally
- Pumping speed identical at 50 and 60 Hz
- Reduced Ambient Noise
- Only 55 dB(A)
- Wide Range of Peak Speed
- 100, 300, 600 and 800 m3h-1