• Description
  • Specification

Description

The Edwards iH dry pumps offer a highly reliable, low cost pump for difficult processes where particulate, condensable or corrosive by-products are present. The iH series has a five stage base pump with an innovative cantilever rotor, claw and roots design which improves dust handling and reduces exhaust noise. In addition, iH series pumps are fitted with a single stage mechanical booster pump and totally enclosed water cooled motors.

Specification

  • Optimized utilities consumption.
  • No preventative maintenance required.
  • Cantilevered shafts and specially profiled rotors for better handling of particles.
  • Reserve motor power also maximizes reliability on harsh-duty CVD applications.
  • Corrosion resistant materials allow pumping of corrosive gases.
  • Higher operating temperatures provide ample margin to prevent gas condensation.
  • The one-piece shaft eliminates the need for a motor coupling and a fifth pumping stage removes the need for a silencer and eliminates particle accumulation, both reducing the overall footprint.