Manipulator MiBot

  • Description
  • Specification
  • Consumables


The miBot™ is the smallest nanometer resolution manipulator of the market. The use of piezo actuators in a revolutionary mobile motion technology makes the miBot™ both extremely precise and very easy to control. Diverse micro-tools can be mounted on the miBot™ tool holder, which makes it particularly well-suited for R&D applications in material science, microelectronics and photonics, whenever in situ physical interactions with the sample are sought.

Nanomanipulation has never been so easy.

The miBot manipulator is a mobile micro-robot. It means that it moves directly over the surface of the base on which your sample lays and has no mounting screws. The manipulator can therefore be pre-positioned by hand, making it very fast to set-up and reconfigure.

Moreover, no movements of the miBot manipulator are coupled. It makes it extremely intuitive to control, significantly reduces the time to achieve complex manipulation, and eliminates the risk of damaging samples.


Specification depends on MICRO or NANO solution :

Dimensions & weight

Body: 20.5 x 20.5 x 13.6 mm3

Arm: 8.3 mm (without tool)

Weight: 12 g (without tool)





Piezo mode: stepping

Max. speed: 2.5 mm/s (X,Y), 150 mrad/s (Z)

Range: 20 x 20 mm2

(X,Y), ± 180° (qZ), 42° (Z)

Positioning resolution: 50 nm (X, Y), 120 nm (Z)

Measured at robot end-effector.


Probe tips :

Compatible with probe tips with 0.51 mm (0.020”) shank

diameter and various tip radius(5 nm – 10 um).



Max. positioning resolution:

Motion modes: coarse (stepping) and fine (scanning)

Stepping: 50 nm (X, Y), 120 nm (Z)

Scanning: 1.5 nm (X, Y), 3.5 nm (Z)


Motion range

Stepping (XY,R,Z): 20 x 20 mm2 , ± 180°, 42°

Scanning (X Y Z): 440 x 250 x 780 nm3

Note: in stepping, actual X, Y, R range are limited by the size and shape of the stage where the miBot moves, and the length of the driving cable.



X and Y: up to 2.5 mm.s-1 Z: up to 150 mrad.s-1