XFlash®7 EDS detector for SEM and FIB

  • Description
  • Specification
  • Consumables


  • Bruker’s latest generation of QUANTAX EDS features the XFlash® 7 detector series, which provides the largest solid angle for X-ray collection (also called collection angle) and the highest throughput.
  • The XFlash® 7 continues to set standards in performance and functionality in energy-dispersive spectrometry for the Scanning Electron Microscope (SEM), Focused Ion Beam (FIB-SEM) and Electron Probe Micro Analyzer (EPMA).
  • The XFlash® 7 detector family also offers optimized solutions for EDS analysis of electron transparent specimens in TEM and SEM, as well as the unique XFlash® FlatQUAD, a detector made to answer your questions on challenging samples.
  • Slim-line technology, large collection angle design, latest generation pulse processing, maximized system uptime through predictive maintenance.
  • Highest spectral performance obtained with best energy resolution.
  • Increased accuracy of results by sophisticated quantification algorithms and a unique combination of standardless and standard-based methods


Real analytical throughput up to 1,000,000 cps
Achieve unmatched analysis speed

2,200 Element lines
Quantify the most complex data using the most comprehensive atomic database incl. K, L, M and N lines

1.1sr Largest solid angle for X-ray collection
Maximize your sample throughput with optimum geometry for most efficient collection of the generated X-rays

Wide range of detector sizes:
60 and 100 mm2 area detectors offer ideal solutions for microanalysis and nanoanalysis

Unique QUANTAX FlatQUAD is the EDS microanalysis system based on the revolutionary XFlash® FlatQUAD. This annular four-channel silicon drift detector is inserted between SEM pole piece and sample, achieving maximum solid angle in EDS. In combination with the ESPRIT analytical software suite, QUANTAX FlatQUAD provides unrivaled mapping performance, even for the most difficult samples.

Best energy resolution for light element and low energy analysis:

  • 123 eV ultimate
  • 126 eV premium
  • 129 eV standard
  • All resolutions specified exceeding ISO 15632:2012

Slim-line detector technology for even more counts and lower beam currents
Shortest detector to sample distances for maximum solid angle in SEM, FIB-SEM and microprobe

Compact design and low weight

  • High precision slider with fully integrated motor for precise positioning
  • Improved heat sink geometry for stable measurement conditions


Stoliki do SEM Ø25.4, standardowa nóżka, aluminium


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