High vacuum coater EM ACE 600
Description
Imaging of non-conductive materials by electron microscopy requires covering sample surface with a thin layer, which acts as not only a conductor but also protects the examined material against electron beam damage.
The Leica EM ACE600 high vacuum coater is the perfect solution for every application. It is a fully automatic device that allows you to easily obtain thin, fine-grained and conductive metallic or carbon layers.
- High repeatability and quality of obtained coatings
- Larger and more even coverage due to angular sputtering sources
- Unique and intuitive control system (touch panel)
- System for continuous monitoring of coating thickness
Specification
- metal vacuum chamber with dimensions of 200 x 150 x 195 mm
- oil-free pump system including a diaphragm (13 l / min) and turbomolecular (67 l / s) pump
- QSG (module with a quartz crystal for measuring the thickness layer with an accuracy of 0.1 nm), a set of 10 crystals
- automatic sample stage rotation
- LED lighting
- metal inner chamber cover
- removable chamber door with large, replaceable and safe window
- easily replaceable head without the need for additional tools
- plug for extension with a freezing handle
- set of gloves to keep the chamber clean
- power cable
- brush to clean the remaining fibers from the head
Accesories
I Carbon thread evaporation,
II Sputtering,
III Carbon rod evaporation,
IV e-beam evaporation
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- Manual stage
- Tilt from 0° to ± 60 °)
- flat, diameter 104 mm, with 24 pins for 24 standard stubs (12.7 mm / 1/2 ”),
- Motorized stage
- Movement in 3 axes (rotation, height and tilt) controlled from the touch screen
- Stage accommodates 25 standard SEM stubs (12.7 mm / 1/2 ”),
- Planetary stage, diameter 104 mm, with 6 smaller tables Ø 60 mm, each adapted for 4 tables,
- low angle rotary shadowing (in a possible configuration for TEM grids or SEM stubs)
- Stage for slides
Additional equipment:
- Module for glow discharge (no later update possible)
- Leica EM VCT500 sample transfer system (with cryo transfer option)
- Module for freeze fracturing