Micro computed tomography (Micro-CT) for SEM adds true 3D microscopy to your SEM, regardless of manufacturer and model. Micro-CT for SEM extends the surface information gained with conventional SEM imaging by allowing an unique insight into a specimen’s internal microstructure, non-destructively and with ease of use.
Technical Details
- Easy to Use
- Micro-CT for SEM does not require any modifications to the standard SEM construction. It can be used for conductive and non-conductive samples
- Precision rotation stage for high resolution imaging
- The rotation stage with 0.45° minimum step size for high resolution imaging is combined with a motorized linear stage to vary the distance between the X-ray emission point and the object for adjusting the magnification of the X-ray images
- High resolution X-ray imaging
- Micro-CT for SEM features a direct detection air cooled 16 bit CCD camera protected by a Be window, available with a resolution of 512×512 or 1024×1024 pixels. The typical exposure time is 2 to 4 s, the possible range is 0.5 to >100 s. The system provides 32 bit floating point reconstruction with 8 or 16 bit reconstructed slices
- Powerful analytical software
- The software includes an acquisition program, a 3D reconstruction module, a viewing program, a versatile package for 2D/3D numerical analysis of the object’s internal morphology and a program for 3D rendering with realistic visualization and movie creation
- Additional specifications
- Standard X-ray target material – brass (8–9.6 keV), fixation for custom targets
- Detail detectability down to 400 nm; < 800 nm low contrast resolution
- Pixel size in the object: 400 nm to 8 μm (depends on magnification)
- No ring artifacts
- Reconstruction during acquisition
- Required e-beam current typically more than 100 nA
