The Phenom XL Scanning Electron Microscope (SEM) pushes the boundaries of compact desktop SEM performance. It features the proven ease-of-use and fast time-to-image of any Phenom system.
It is also equipped with a chamber that allows analysis of large samples up to 100 mm x 100 mm. A proprietary venting/loading mechanism ensures the fastest vent/load cycle in the world, providing the highest throughput. A newly developed compact motorized stage enables the user to scan the full sample area, and yet the Phenom XL is a desktop SEM that needs little space and no extra facilities.
Ease-of-use is given an extra boost in the Phenom XL with a single-shot optical navigation camera that allows the user to move to any spot on the sample with just a single click – within seconds.
Light optical magnification 3 – 16x Electron optical magnification range 80 – 100,000x Resolution ≤ 14 nm Digital zoom Max. 12x Light optical navigation camera Color Acceleration voltages Default: 5 kV, 10 kV, 15 kV i 20kV
Advanced mode: adjustable range between 4,8 kV and 20,5 kV imaging and analysis mode Secondary Electron Detector
Vacuum modes · Standard mode
· Charge reduction mode
· High vacuum mode
Detector · BSD
· SED (optional)
· EDS (optional)
Sample size · Max. 100 mm x 100 mm
· Up to 36 x 12 mm pin stubs
Sample height Max. 65 mm