Scanning electron microscope Phenom XL

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Phenom XL

The Phenom XL Scanning Electron Microscope (SEM) pushes the boundaries of compact desktop SEM performance. It features the proven ease-of-use and fast time-to-image of any Phenom system.

It is also equipped with a chamber that allows analysis of large samples up to 100 mm x 100 mm. A proprietary venting/loading mechanism ensures the fastest vent/load cycle in the world, providing the highest throughput. A newly developed compact motorized stage enables the user to scan the full sample area, and yet the Phenom XL is a desktop SEM that needs little space and no extra facilities.

Ease-of-use is given an extra boost in the Phenom XL with a single-shot optical navigation camera that allows the user to move to any spot on the sample with just a single click – within seconds.

  • Light optical magnification 3 – 16x
    Electron optical magnification range 80 – 100,000x
    Resolution ≤ 14 nm
    Digital zoom Max. 12x
    Light optical navigation camera Color
    Acceleration voltages Default: 5 kV, 10 kV, 15 kV i 20kV

    Advanced mode: adjustable range between 4,8 kV and 20,5 kV imaging and analysis mode Secondary Electron Detector

    Vacuum modes ·         Standard mode

    ·         Charge reduction mode

    ·         High vacuum mode

    Detector ·         BSD

    ·         SED (optional)

    ·         EDS (optional)

    Sample size ·         Max. 100 mm x 100 mm

    ·         Up to 36 x 12 mm pin stubs

    Sample height Max. 65 mm

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